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Scanning Probe Lithography - 9781441948946
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Specificaties
- Objectstaat
- Book Title
- Scanning Probe Lithography
- ISBN
- 9781441948946
- Subject Area
- Material Science, Electrical Engineering
- Publication Name
- Scanning Probe Lithography
- Publisher
- Springer-Verlag New York Inc.
- Subject
- Engineering & Technology, Physics
- Publication Year
- 2010
- Series
- Microsystems
- Type
- Textbook
- Format
- Paperback
- Language
- English
- Item Height
- 235 mm
- Item Weight
- 710 g
- Item Width
- 155 mm
- Number of Pages
- 197 Pages
Over dit product
Product Information
Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.
Product Identifiers
Publisher
Springer-Verlag New York Inc.
ISBN-13
9781441948946
eBay Product ID (ePID)
178331007
Product Key Features
Number of Pages
197 Pages
Language
English
Publication Name
Scanning Probe Lithography
Publication Year
2010
Subject
Engineering & Technology, Physics
Type
Textbook
Subject Area
Material Science, Electrical Engineering
Series
Microsystems
Format
Paperback
Dimensions
Item Height
235 mm
Item Weight
710 g
Item Width
155 mm
Volume
7
Additional Product Features
Country/Region of Manufacture
United States
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Informatie van zakelijke verkoper
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Btw-nummer:
- GB 976952259
Handelsregistratienummer:
- 06687355
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Ik verklaar dat al mijn verkoopactiviteiten zullen voldoen aan alle wet- en regelgeving van de EU.
KVK-nummer:
- 06687355
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